2012年6月13日 · Embodiments of the invention include a heated load lock chamber. In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein. Each lamp assembly includes a …

传输室与工艺腔室通过传输阀连接，通过机械手在传输室和工艺室内传输产品，可消除在每个基片循环期间工艺室排气和排空过程，提高系统效率。 该设备是兼容高真空环境的自动传输系统。 传输室与工艺腔室通过传输阀连接，通过机械手在传输室和工艺室内传输产品，可消除在每个基片循环期间工艺室排气和排空过程，提高系统效率。 该设备是兼容高真空环境的自动传输系统。 传输室与工艺腔室通过传输阀连接，通过机械手在传输室和工艺室内传输产品，可消除在每个基片 …

The present invention provides a wafer heating process and apparatus for uniform and rapid heating in a changing pressure environment, such as a load lock. In accordance with the invention, a...

LoadLock is a photocathode processing/insertion unit for the SLAC polarized electron guns. It retains vacuum integrity when disconnected from a gun, therefore, a single LoadLock can serve a succession of guns. The unit consists of a number of sub-units. These are:

Hybrid heating type of high-frequency induction heating to heat the wafers, and heater for heating the raw materials. It can process a maximum of 16 wafers. before-processed wafers are taken out from the wafer stocker, transported, heat-treated, and returned to the wafer stocker by fully automatic process.

• 可对应有机EL（OLED）的低温成膜用Heater • 使用Tray可搬送多种基板尺寸 • 通过使用真空Box实现C系列的间接连续制程（Sputter: CS-200, Evaporation: CV-200）

A load lock is required to routinely load substrates or targets into the deposition system. The unique VACGEN load lock design can be used to transfer the targets and substrates utilising the same hardware and therefore minimises cost for the overall system. A magnetic transfer arm manoevres the puck from the load lock, through a gate valve, into

Fralock provides custom-engineered heaters for critical in-chamber, testing, and packaging a variety of both front and back-end semiconductor manufacturing applications. We types, providing you with options to choose the ideal material solution for your requirements.

Load lock chambers are generally used to facilitate transfer of the substrates between the vacuum environment of the transfer chamber and an environment of a factory interface wherein...

The heater is a newly designed double-shell LGO element capable of rapidly raising and lowering the furnace temperature and maintaining stability. The new controller is working with Windows NT software. As an option a load lock, rapid cooling and boat rotation are available. A FOUP version is available meanwhile.