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飞秒激光微结构加工与3D纳米打印技术推动VCSEL集成在 ...
针对这一挑战,研究人员创新性地将飞秒激光微加工 (FLICE)与双光子聚合直接激光写入 (2PP-DLW)技术相结合,开发出全新的VCSEL集成方案。通过FLICE在熔融石英上精确加工微米级凹槽作为VCSEL的"巢穴",采用面朝上装配方式保留发射区可操作性,并利用2PP-DLW直接在VCSEL上3D打印微光学元件。这种技术路线 ...
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