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基于MEMS四臂弯曲梁膜片的光纤法珀加速度传感器设计与光谱相位解调 ...
研究意义在于:1) 四臂弯曲梁设计突破传统金属膜片频带限制;2) 陶瓷封装提升环境适应性;3) 光谱相位算法兼顾高分辨率与大动态范围。作者Zhuang Changquan等指出,该传感器在复杂环境下的长期稳定性仍需进一步验证,未来可通过材料优化进一步提升性能。
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