Experimental results indicate significant improvements in defect pattern classification by avoiding cutting important regions in cutout augmentation. The proposed method achieves new state-of-the-art ...

Asymmetries in wafer map defects are usually treated as random production hardware defects. For example, asymmetric wafer defects can be caused by particles inadvertently deposited on a wafer during ...

SiC trails behind the mature silicon industry in adopting advanced analytics and streamlined yield management systems (YMS).

Traditionally, optical techniques are used to scan a wafer for potential defects ... optical inspection creates much denser defect maps, which can require as much as a 100X increase in the ...

Traditionally, optical techniques are used to scan a wafer for potential defects ... optical inspection creates much denser defect maps, which can require as much as a 100X increase in the ...

The usual way to spot defects on silicon wafers has been done manually, with human operators examining each wafer by eye. This is both time-consuming and error-prone due to the fine attention to ...

KLA has machines like broadband plasma patterned wafer defect inspection systems that inspect wafers and verify accurate measurements. The company is a large customer or supplier for the biggest ...