Abstract: We developed a pneumatic high precise position controllable servo valve for a pneumatic precise positioning system. To improve the performance of a pneumatic, improvement of the servo valve ...

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We developed a pneumatic high precise position controllable servo valve for a pneumatic precise positioning system. To improve the performance of a pneumatic, improvement of the servo valve ...

Step response: 1.5msec (0 ⇔ 100%) Frequency responce Gain -3dB: 630Hz (command signal: ±25%) Phase -90°: 490Hz (command signal: ±25%) Contamination Level: NAS1638 Class 10 ...