Institute for National Measurements Standards, National Research Council Canada, Ottawa, Ontario, Canada, K1A 0R6, and College of Chemistry, Sichuan University, Chengdu, Sichuan, 610064, China Article ...

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Abstract: NbN films were deposited on unheated Si substrates by dc and rf reactive planar magnetron sputtering of Nb in an Ar and N 2 gas mixture. The optical emission spectrum of the plasma was ...

Herein, the operating conditions of an inductively coupled plasma optical emission spectrometer were optimized for the determination of REEs ... The detailed description of the equipment and ...

Abstract: In this study, we diagnose and monitor the plasma process in real time using optical emission spectroscopy (OES). Notably, this method is inexpensive and can effectively diagnose the plasma ...