Institute for National Measurements Standards, National Research Council Canada, Ottawa, Ontario, Canada, K1A 0R6, and College of Chemistry, Sichuan University, Chengdu, Sichuan, 610064, China Article ...

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Abstract: NbN films were deposited on unheated Si substrates by dc and rf reactive planar magnetron sputtering of Nb in an Ar and N 2 gas mixture. The optical emission spectrum of the plasma was ...