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For example, block copolymer lithography has enabled the creation of high-density memory arrays in computer chips, offering the potential for increased storage capacity and reduced power consumption.

for example, if it performs as planned, could be one avenue to such an extension. Others on the panel, however, do not foresee such a long lifetime for EUV. Young Seog Kang, a Fellow at Samsung, is ...

Several papers discussed hyper-NA EUV lithography as a potential future technology. For some technical issues, although not considered as showstoppers, more progress is needed. For example, greater ...

The progress being made on key lithographic challenges is consistently of interest to attendees, and there will be many timely presentations that address issues of current significance. For example, ...

Lithography, based on conventional ink-printing processes ... semiconductors and insulators withstand extremely harsh environments, for example, high temperature, strong corrosive acids and plasmas ...