Abstract: This paper presents inline and offline X-ray photoelectron spectroscopy (XPS) data of thick SiN films prepared by plasma-enhanced chemical vapor deposition (PECVD) and low-pressure chemical ...

Scanning x-ray microprobe technology, that provides high performance XPS large area spectroscopy, superior micro-area spectroscopy, chemical imaging, and secondary electron imaging with a raster ...

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All XPS spectra were recorded with a pass-energy of 11.75 eV and an energy step increment of 0.1 eV/step. An electron beam (50 W/15 kV potential) focused on an Al anode surface generated the 200 µm ...