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溅射功率对Ta/Si共掺杂DLC薄膜高温结构和摩擦学行为的影响
由于具有极低的摩擦系数、高热导率、优异的耐磨性、高硬度、化学惰性和良好的生物相容性及光学透明性等卓越性能,类金刚石(DLC)薄膜受到了广泛关注。其被广泛用做切削工具、汽车零部件、生物医学以及各种工程领域的耐磨和减摩薄膜。然而,DLC 膜面临 ...
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