Summary Pixel-level dose correction (PLDC) enhances mask quality by solving both uniformity and linearity issues in mask manufacturing. Unlike traditional mask process correction (MPC) solutions, PLDC ...
This is not a lot, considering the fact that TSMC may charge as much as $16,000 per 300-mm wafer produced using its 4nm-class or 5nm-class fabrication technologies. Considering defect density and ...