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SiC trails behind the mature silicon industry in adopting advanced analytics and streamlined yield management systems (YMS).
A new technical paper titled “Semi-Supervised Learning with Wafer-Specific Augmentations for Wafer Defect Classification” was published by researchers at Korea University. “Semi-supervised learning ...
Asymmetries in wafer map defects are usually treated as random production hardware defects. For example, asymmetric wafer defects can be caused by particles inadvertently deposited on a wafer during ...
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the spatial pattern of the defects usually provides a good approach to wafer problem solving. Ken et al. (2002) outline that special shapes appearing on the defect map pattern may come from the ...
Abstract: In order to monitor process, in-line wafer defect inspection is an extremely important link. When the process has an excursion, a certain characteristic defect map is often formed on the ...
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