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SiC trails behind the mature silicon industry in adopting advanced analytics and streamlined yield management systems (YMS).
A new technical paper titled “Semi-Supervised Learning with Wafer-Specific Augmentations for Wafer Defect Classification” was published by researchers at Korea University. “Semi-supervised learning ...
This project aims to process 2D images of semiconductor silicon wafers to identify any defects on the wafers as well as their corresponding locations.
Asymmetries in wafer map defects are usually treated as random production hardware defects. For example, asymmetric wafer defects can be caused by particles inadvertently deposited on a wafer during ...
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the spatial pattern of the defects usually provides a good approach to wafer problem solving. Ken et al. (2002) outline that special shapes appearing on the defect map pattern may come from the ...
Abstract: In order to monitor process, in-line wafer defect inspection is an extremely important link. When the process has an excursion, a certain characteristic defect map is often formed on the ...