ULVAC Continues Participation in Lab-in-Fab Project to Advance Piezoelectric MEMS Technology, Now Entering a New Phase <stro ...

Abstract: The method of deposition of metals oxide and nitride coatings with using of glow discharge electron ... Published in: XXIst International Symposium on Discharges and Electrical Insulation in ...

† Physics Department, The University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, United States ‡ Materials Science and Engineering Department, The University of Texas at ...

Center for Energy Storage Research, Korea Institute of Science and Technology (KIST), Hwarang-ro 14-gil 5, Seongbuk-gu, Seoul 02792, South Korea Department of Materials Science and Engineering, Seoul ...