Abstract: The method of deposition of metals oxide and nitride coatings with using of glow discharge electron ... Published in: XXIst International Symposium on Discharges and Electrical Insulation in ...

Veeco Instruments has announced that the University of Michigan has published a breakthrough study on atomic layer deposition ...

ULVAC Continues Participation in Lab-in-Fab Project to Advance Piezoelectric MEMS Technology, Now Entering a New Phase <stro ...