To understand the operating mechanism and origins of selectivities, density functional theory (DFT) calculations were performed, and several additional experiments were conducted. The olefin insertion ...

MOE Key Laboratory of Bioinorganic and Synthetic Chemistry, GBRCE for Functional Molecular Engineering, School of Chemistry, IGCME, Sun Yat-Sen University, Guangzhou 510275, China ...

Directional etching profiles are realized and 1-µm patterns with less than 0.05-µm undercutting are obtained. High etching selectivities are achieved. Methods for preventing and removing contamination ...

Selectivities in the etch rates of oxide versus nitride layers higher than 60 were achieved, together with a high within-wafer and wafer-to-wafer uniformity. The etching mechanisms are proposed to be ...

This study investigates upscaling of bio-diesel industry crude glycerol to 1,3-propanediol at a 10 L scale, using C.