EUV技术自从其提出以来，面临着多重挑战，包括高成本、复杂的光学系统以及需要在高精度下制造光罩等。然而，随着技术不断成熟，EUV逐渐突破了制程限制，尤其在10nm及以下的制程中展现出了其不可替代的优势。

When not on the beat for Fit&Well, Chris writes about technology for Trusted Reviews and WIRED, sports for The Guardian and just about everything else for Shortlist, Pellicle, Digital Spy and a ...

Department of Prosthodontics and Periodontology, Piracicaba Dental School, Universidade Estadual de Campinas (UNICAMP), Av. Limeira, 901, Piracicaba, São Paulo 13414-903, Brazil ...