Institute for National Measurements Standards, National Research Council Canada, Ottawa, Ontario, Canada, K1A 0R6, and College of Chemistry, Sichuan University, Chengdu, Sichuan, 610064, China Article ...

Creative Commons (CC): This is a Creative Commons license. Attribution (BY): Credit must be given to the creator. Article Views are the COUNTER-compliant sum of full text article downloads since ...

Abstract: NbN films were deposited on unheated Si substrates by dc and rf reactive planar magnetron sputtering of Nb in an Ar and N 2 gas mixture. The optical emission spectrum of the plasma was ...

Inductively coupled plasma optical emission spectrometry (ICP OES) has been widely used for multi-element analysis and is recognized as one of the most effective techniques for determination of major, ...

Abstract: In this study, we diagnose and monitor the plasma process in real time using optical emission spectroscopy (OES). Notably, this method is inexpensive and can effectively diagnose the plasma ...