National Laboratory of Solid-State Microstructures and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, Jiangsu 210023, China School of Electronic Science and ...

Abstract: EUV is currently the state-of-the-art lithography technology used to print the most critical layers of ICs, specifically of advanced logic and DRAM. It represents the highest achievement in ...

Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Thun 3602, Switzerland ...