School of Chemistry and Chemical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China Micro-Nano Energetic Devices Key Laboratory, Ministry of Industry and ...
Challenges like higher selectivity and precise etching are critical for angstrom-scale IC production. Advanced RF pulsing and plasma control enhance precision in sub-nanometer processes.
Department of Physics and Astronomy, University of Wyoming, Laramie, Wyoming 82071, United States Center for Quantum Information Science and Engineering, University of Wyoming, Laramie, Wyoming 82071, ...