Ellipsometry porosimetry (EP) technology was patented by IMEC and is licensed exclusively to Semilab. Ellipsometric Porosimetry (EP) measures the alterations in optical properties and thickness of ...

Unlike conventional ellipsometers, all structures within the field of view are measured concurrently. The EP4 offers ellipsometric-contrast live view, detecting sub-nm features and identifying regions ...

Semilab uses the most advanced rotating compensator layout, in which a high-end, broadband compensator introduces variable phase shift that is dependent on the rotation angle to spectrally determine ...