Isotropic etching is useful for creating curved or sloped nanostructures, such as nanolenses or tapered nanowires. Anisotropic wet etching exhibits directional dependence, with faster etching in ...

For instance, a study on MEMS accelerometers highlighted the use of compensation structures to counteract the preferential undercutting that occurs during wet anisotropic etching of silicon wafers.

Isotropic vs. anisotropic etching. Most wet etching methods are isotropic to some degree, which can lead to problems like undercutting. With the notable exception of scratching out traces with an ...

It combines the chemical reactivity of reactive species with the physical bombardment of energetic ions to achieve highly anisotropic and selective etching ... chlorine-based gases are commonly used ...