Barring a major breakthrough in lithography, chipmakers are using today’s 193nm immersion and multiple patterning for both 16/14nm and 10nm. Now, chipmakers are focusing on the lithography options for ...
It also devised a flow using today’s 193nm immersion lithography and multi-patterning. “For the first time, 20nm DRAM has been developed and fabricated successfully without extreme ultraviolet ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback